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OptiLayer:  Your Partner in Design and Post-Production Characterization of Optical Coatings

 

 Surface Roughness

Surface Inhomogeneity mode allows you to find the dependence of optical parameters on the thickness of a thin film.  The Surface Inhomogeneity mode allows determining the surface inhomogeneity in the near substrate and the near ambient regions.

surface inhomogeneity


surface inhomogeneityRefractive index profile with surface overlayer

surface inhomogeneityExperimental ellipsometric angle Psi.

surface inhomogeneity

 Experimental ellipsometric angle Delta

surface inhomogeneity

Intermediate fitting of experimental angle Psi by model angle Psi after application of homogeneous thin film model.

surface inhomogeneity

Intermediate fitting of experimental angle Delta by model angle Psi after application of homogeneous thin film model. Deviations between experimental and model angle Delta indicate presence of surface inhomogeneity (overlayer).

surface inhomogeneity

Final fitting of experimental angle Psi by model angle Psi after application of more sophisticated model taking into account surface inhomogeneity (overlayer).

surface inhomogeneity ellipsometry

Final fitting of experimental angle Delta by model angle Psi after application of more sophisticated model taking into account surface inhomogeneity (overlayer).

Details in our publications:

  1. A. V. Tikhonravov, M. K. Trubetskov, A. A. Tikhonravov, and A. Duparre', "Effects of interface roughness on the spectral properties of thin films and multilayers ," Appl. Opt. 42, 5140-5148 (2003).
  2. D. Ristau, S. Gunster, S. Bosch, A. Duparre, E. Masetti, J. Ferre-Borrull, G. Kiriakidis, F. Peiro, E. Quesnel, and A. Tikhonravov, "Ultraviolet optical and microstructural properties of MgF2 and LaF3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation ," Appl. Opt. 41, 3196-3204 (2002).
  3. A. Tikhonravov, M. K. Trubetskov, A. V. Krasilnikova, E. Masetti, A. Duparre, E. Quesnel, and D. Ristau, "Invesitigation of the surface micro-roughness of fluoride films by spectrometric ellipsometry," Thin Solid Films 397, 229-237 (2001).
  4. A. V. Tikhonravov, M. K. Trubetskov, E. Masetti, A. V. Krasilnikova, I. V. Kochikov, Sensitivity of the ellipsometric angles psi and delta to the surface inhomogeneity, Proc. SPIE. 3738, Advances in Optical Interference Coatings 173 (1999)

 

 

 

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