OptiLayer enables estimating the effect of errors accumulation in the case of optical monitoring. The main ideas and theoretical background can be found in our publications.

Main settings of the pre-production estimations of errors for the broadband and monochromatic monitoring are entered in the setup dialog. In the case of monochromatic monitoring, the errors are dependent on the monitoring strategy. Hence, before using this option a monitoring spreadsheet is required.

In order to estimate thickness errors, it is necessary to specify what kind of errors is of interest:

• Random noise in measurement data and their level in %;
• Systematic shift  of measurement data and the corresponding level in %;
• Direct thickness errors in nm.