Substrate Characterization

OptiChar allows you to characterize substrates on the basis of photometric and ellipsometric data. The set of substrate characterization models is the same as for layer characterization.  The only difference is that the thickness of the substrate is not determined in the course of the substrate characterization procedure.You have to specify the thickness of the substrate before starting the characterization procedure.

substrate characterization
substrate characterization Fitting of measured reflectance data related to CaF2 substrate by model reflectance. substrate characterizationFitting of measured transmittance data related to CaF2 substrate by model transmittance.

A. V. Tikhonravov, M. K. Trubetskov, T. V. Amotchkina, A. A. Tikhonravov, D. Ristau, S. Günster, Reliable determination of wavelength dependence of thin film refractive index, Proc. SPIE. 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies 331 (2003)