Substrate Back Side

OptiLayer allows you to take into account Substrate Back Side when experimental reflectance/transmittance are measured with sample back side.

In order to see the difference between calculations with and without sample back side put the mouse in and out of the right pane pictures.

Recent versions of OptiChar and OptiRE are able to process ellipsometric data having Depolarization caused by back side reflections (see H. Fujuwara, Spectroscopic Ellipsometry Principles and Applications, John Wiley & Sons, 2007, ISBN 978-0-470-01608-4).
reflectance with back side

depolarization ellipsometry

ellipsometry with depolarization

Depolarization can be included into measurement data set in the course of the characterization process: 

T.V. Amotchkina, M.K. Trubetskov, A. V. Tikhonravov, V. Janicki, J. Sancho-Parramon, and H. Zorc. "Comparison of two techniques for reliable characterization of thin metal-dielectric films." Appl. Opt. 50, 6189-6197 (2011).