Random Errors
Random Errors mode performs a search for random errors in layer thickness. This search is a multiparametric inverse problem which solution may be unstable and non-unique. One of the ways to overcome the ambiguity of the reverse engineering results is to involve more input experimental data, for example, multi-scan measurements. Random errors model assumes that different errors in coating layers. In this case the model coating is described by the vector \(X\): \[ X=(d_1+\delta_1,...,d_m+\delta_m), \] where \(d_1,...,d_m\) thicknesses of design layers, \(\delta_1,...,\delta_m\) absolute errors in layer thicknesses.
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Random errors algorithm is base on the minimization of the discrepancy function with respect to errors in layer thicknesses: \[ DF=DF(\delta_1,...,\delta_m)\rightarrow \min \] In Random Errors Setup you can specify the upper boundaries of the errors. You can also specify what errors you are searching for (Active column).
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The mathematical algorithms of OptiRE help you to overcome the problems connected with the instability and non-uniqueness of reverse engineering solutions. Reverse engineering methodology is carefully studied in our publications. |
Application of this option is demonstrated and discussed in our publications:
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